کنفرانس مهندسی برق ایران

صفحه اصلی / سی امین کنفرانس بین المللی مهندسی برق

Design and Simulation of a Novel High Sensitive MEMS Microphone Based On a Spring-Supported Circular Diaphragm

نویسندگان :

Mehdi Pazhooh¹ Ebrahim Abbaspour-Sani²

1- دانشگاه ارومیه 2- دانشگاه ارومیه

کلمات کلیدی :

Capacitive Microphone،MEMS،Spring-Supported Diaphragm،Microphone Modeling،Lumped-element Equivalent Circuit

چکیده :

In this paper, we presented a novel single-chip MEMS capacitive microphone with a spring-supported circular diaphragm. Surface micromachining and backside etching techniques were used to create a flexible diaphragm and a rigid single-crystal backplate for the capacitive microphone. The structure has a diaphragm with a thickness of 2 µm, a diaphragm radius of 400 µm, and an air gap of 2 µm. The slots are made on the diaphragm to reduce the air damping and improve the sensitivity by reducing the mechanical stiffness of the diaphragm. We designed and optimized the structure parameters using electrostatic-mechanical coupling finite element analysis (FEA). The sensitivity and frequency response of the microphone was investigated using a lumped-element model. The proposed microphone’s sensitivity is -29.5 dBv/Pa under 3 V dc bias. The proper design of the perforated backplate results in a bandwidth of nearly 27 kHz. Considering the acoustic-thermal noise, SNR is predicted to be 61.5 dB.

لیست مقالات

لیست مقالات بایگانی شده

ارائه روشی جهت بهبود عملکرد شبکه‌های بی‌سیم حسگر ناهمگون مبتنی بر برداشت انرژی

محمد فرشته حکمت - علیرضا کشاورز حداد

Improving ZVS performance in phase shift LLC converter using variable magnetizing inductor for wide input/output voltage range

Saeed Ramezani darvish - Kioumars Shahriyari - Salar Sadeghian - Adib Abrishamifar

Improving the Performance of Unified Power Quality Conditioner Using Interval Type 2 Fuzzy Control

Farzad Rastegar - Zohreh Paydar

Control of optical bistability in one-dimensional photonic crystals with a central layer doped with Landa-type three-level atoms using atomic and laser parameters

Akbar Ashrafabadi - Siamak Khademi - Ghasem Naeimi

A Vibration Measurement Device for Condition Monitoring of Medium-Voltage Circuit Breakers

Aref Nikraftar Khameneh - Mohammad Hamed Samimi

نحوه کنترل سطوح هوشمند با قابلیت تنظیم مجدد در راستای مقابله با استراق سمع کننده ها

محمد کاظم ناطقی - زلفا زینل پور یزدی

BLSTM-Convolutional Neural Networks for Respiratory Disease Diagnosis

Mohammad Hassan Khamechian - Mohammad Reza Akbarzadeh Tootoonchi

خلاصه سازی ویدیوهای کپسول آندوسکوپی با رویکرد یادگیری انتقالی

محدثه امیریان چایجان - رضا آقائی زاده ظروفی - مسعود رضا سهرابی

A Hybrid Approach for Multimodal Biometric Recognition based on Feature Level Fusion in Reproducing Kernel Hilbert Space

Mohammad Hassan Safavipour - Mohammad Ali Doostari - Hamed Sadjedi

Cascaded Multilevel Inverter with Reduced Switch Count

Mohammadamin Aalami - Ebrahim Babaei - Saeid Ghassem Zadeh

بیشتر

ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 42.0.4