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صفحه اصلی
/
سی و دومین کنفرانس بین المللی مهندسی برق
Design and Manufacturing of a Programmable Spin Coater Based on a Brushless DC Motor
نویسندگان :
MirBehrad Mousavi
1
Saeed Javadizadeh
2
Seyed Ahmadreza Firoozabadi
3
Majid Badieirostami
4
1- دانشگاه تهران
2- دانشگاه تهران
3- دانشگاه تهران
4- دانشگاه تهران
کلمات کلیدی :
Spin coating،brushless motor control،digital control of DC motor،cost-efficient spin coater
چکیده :
In this paper, an affordable and easily controllable motor type, suitable for being incorporated into a spin coater, is introduced. We present an effective motor control method using linear regression and its corresponding setup, which was employed to manufacture a versatile and programmable spin coater capable of executing multi-stage processes and providing real-time feedback of motor speed to users. Besides, the development of a user-friendly interface is illustrated and the desired performance of the spin coater is confirmed.
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