کنفرانس مهندسی برق ایران

صفحه اصلی / سی و دومین کنفرانس بین المللی مهندسی برق

Design and Manufacturing of a Programmable Spin Coater Based on a Brushless DC Motor

نویسندگان :

MirBehrad Mousavi¹ Saeed Javadizadeh² Seyed Ahmadreza Firoozabadi³ Majid Badieirostami⁴

1- دانشگاه تهران 2- دانشگاه تهران 3- دانشگاه تهران 4- دانشگاه تهران

کلمات کلیدی :

Spin coating،brushless motor control،digital control of DC motor،cost-efficient spin coater

چکیده :

In this paper, an affordable and easily controllable motor type, suitable for being incorporated into a spin coater, is introduced. We present an effective motor control method using linear regression and its corresponding setup, which was employed to manufacture a versatile and programmable spin coater capable of executing multi-stage processes and providing real-time feedback of motor speed to users. Besides, the development of a user-friendly interface is illustrated and the desired performance of the spin coater is confirmed.

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