کنفرانس مهندسی برق ایران

صفحه اصلی / سی و چهارمین کنفرانس بین المللی مهندسی برق

Development of A Single-Rotor Electromagnetic Actuator for Planar Positioning

نویسندگان :

Sadegh Sehhat¹ Ali Sadighi²

1- University of Tehran 2- University of Tehran

کلمات کلیدی :

Single-rotor electromagnetic actuator،two-axis positioning stage،electromagnetic design،position control،trajectory tracking

چکیده :

In industrial applications such as lithography and micro-scale laser machining, achieving high positioning accuracy and speed simultaneously is essential. Mechanisms designed for this purpose are typically based on stacked electrical actuators or integrated compliant structures. Despite their effectiveness, each of these approaches entails specific limitations: stacked mechanisms generally suffer from reduced bandwidth, while integrated mechanisms are constrained by their limited stroke. In this paper, the development of a novel integrated electromagnetic actuator capable of generating motion along two orthogonal directions are proposed. This actuator combines the advantages of integrated systems namely, higher bandwidth and stacked systems which is larger stroke. The fabricated actuator, with a moving mass of 351 grams, a stroke of 17 mm in each direction, and maximum electromagnetic force of 10 N per axis achieved motion bandwidth of 8 Hz.