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صفحه اصلی
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سی و چهارمین کنفرانس بین المللی مهندسی برق
Development of an Air Bearing-Based Linear Nanopositioning Stage
نویسندگان :
Amirhossein Ghazanfarian
1
Mahdi Robati
2
Ali Sadighi
3
1- University of Tehran
2- University of Tehran
3- University of Tehran
کلمات کلیدی :
nano positioning،precision control،air bearings،Lorentz actuator،direct drive،linear motion،precision control،trajectory tracking
چکیده :
In this paper, design and control of a high-precision linear nano positioning stage are presented. The proposed stage employs a direct-drive Lorentz actuator, eliminating the need for intermediate transmission mechanisms. Finite element analysis is conducted to validate the analytical electromagnetic model. In addition, custom-designed air bearing system provides frictionless motion, which is essential for eliminating the inherently-nonlinear and unpredictable effects of friction. Current and position control loops are considered for precise motion control. Experimental results demonstrate a trajectory tracking error of ±80 nm, confirming the effectiveness of the proposed solution.
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