کنفرانس مهندسی برق ایران

صفحه اصلی / سی و چهارمین کنفرانس بین المللی مهندسی برق

Improvement of the Diaphragm and the Spring Designs in a MEMS MIM Capacitive Pressure Sensor

نویسندگان :

Hamid Reza Ansari¹ Zoheir Kordrostami²

1- Shiraz University of Technology 2- Shiraz University of Technology

کلمات کلیدی :

Pressure sensor،MEMS،MIM،Diaphragm

چکیده :

In this paper, a high-sensitivity capacitive MEMS pressure sensor is designed and simulated. The proposed MEMS pressure sensor benefits from two improvement ideas. The diaphragm and the anchor designs have been engineered so that the sensor sensitivity is increased. Gold has been used as the main material for designing the sensor and aluminum nitrate has been chosen as the dielectric layer. Also, a circular diaphragm with a radius of 90 μm is suspended on the upper electrode. The input of the proposed devices is pressure in the range of 100-1500 kPa and their output is capacitive changes that display a linear response. Sensitivity is increased more than 5 times by changing the spring design as well as adding conical parts to the lower surface of the diaphragm. By using the proposed spring design, because of the reduction of the spring stiffness coefficient, the applied force will lead to more displacement than the previous designs. The proposed conical sections on the diaphragm also increase the speed at which the diaphragm reaches the electrode. It has been shown that these two design improvements in the anchor and the diaphragm will increase the sensitivity of the sensor.