کنفرانس مهندسی برق ایران

صفحه اصلی / سی و سومین کنفرانس بین المللی مهندسی برق

Innovative MOEMS Biosensor for Hepatitis DNA Detection Utilizing an Optical Ring Resonator

نویسندگان :

Hossein Bahramian¹ Arash Yazdanpanah Goharrizi²

1- دانشگاه شهید بهشتی 2- دانشگاه شهید بهشتی

کلمات کلیدی :

Biosensor،MOEMS،Hepatitis Virus DNA،Optical ROC

چکیده :

In this work, we propose an innovative MOEMS-based biosensor designed for the detection of target molecules. The sensor integrates a silicon cantilever with a finger structure at its tip and an optical readout circuit consisting of a waveguide and a partially open-ring resonator. When target molecules bind to the biosensor, the cantilever bends, causing the attached finger to displace downward and partially enter the gap of the ring resonator. This displacement modulates the optical coupling in the resonator, resulting in changes to the output light intensity in the waveguide proportional to the concentration of the target molecules. The proposed biosensor demonstrates exceptional performance, with a mechanical sensitivity of 1.8 nm/nM, an optical sensitivity of 1.654×10-31/nM, and an overall electrical sensitivity of 1.7 A/M. These results highlight the sensor’s potential for precise and efficient detection in molecular diagnostics.