کنفرانس مهندسی برق ایران

صفحه اصلی / سی و چهارمین کنفرانس بین المللی مهندسی برق

Design and Development of a biosensor-Based on MOEMS, Using Ring Resonator for Detection of Cancer Biomarkers

نویسندگان :

Zahra Hasanlou¹ Arash Yazdanpanah Goharrizi²

1- دانشگاه شهید بهشتی 2- دانشگاه شهید بهشتی

کلمات کلیدی :

MOEMS،biosensor،cantilever،ring resonator،telemedicine

چکیده :

Abstract— Cancer and other chronic diseases are leading causes of death worldwide, creating an urgent demand for technologies that enable early detection. This paper presents the design and analysis of two highly sensitive optical biosensors based on a micro-opto-electro-mechanical system (MOEMS) for label-free detection of cancer biomarkers. Both sensors use the same functionalized cantilever, which serves as both a mechanical actuator and a biological probe. The sensors differ in their optical detection systems, each employing two silicon waveguides coupled to a silicon micro-ring resonator of a specific size (6.22 µm or 7.14 µm). When target biomarker molecules bind to the cantilever, they induce surface stress, causing it to bend. This nanoscale motion is converted into an optical signal—a shift in the resonant wavelength of the ring. Our comparison shows that one sensor design offers superior performance at low biomarker concentrations, demonstrating a high mechanical sensitivity of 0.5 µm/(ng/mL), an optical sensitivity of 0.138 nm/(ng/mL), and a low detection limit. These findings highlight the strong potential of this sensor for real-time patient monitoring and integration into future telemedicine platforms.