0% Complete
صفحه اصلی
/
بیست و نهمین کنفرانس مهندسی برق ایران
Design of a Controllable and State-observable MEMS Nonlinear Resonator Based on the Awl-shaped Serpentine Spring
نویسندگان :
Ehsan Ranjbar
1
Amirabolfazl Suratgar
2
1- دانشگاه صنعتی امیرکبیر
2- دانشگاه صنعتی امیرکبیر
کلمات کلیدی :
MEMS resonator, Nonlinear, Schematic design, Serpentine, Awl-shaped
چکیده :
The article addresses schematic design, fabrication, and modeling of a nonlinear micro resonator for MEMS applications. It exploits a nonlinear suspension system for a proof mass which shows nonlinear stiffness characteristics. The MEMS resonator is designed in such a way that the states of proof mass displacement and velocity are at the access via the novel embedded electro mechanical substructures of the micro resonator and the proposed electronic circuits as well, for control purposes. This feature is obtained while the resonator is equipped with a symmetric electrostatic actuator alongside the differential capacitance detection mechanism. The nonlinear properties of the suspension spring, which is the major source of nonlinear resonance, are demonstrated via simulation. Ultimately, the article theoretically puts forth the stages of the fabrication process in details.
لیست مقالات
لیست مقالات بایگانی شده
An Improved Version of the SIPO Algorithm with Fast Convergence Speed
Amir Soltany Mahboob - Hadi Shahriar Shahhoseini - Mohammad Reza Ostadi Moghaddam - Shima Yousefi
A Highly-Linear Wideband Differential Low-Noise Amplifier Using Derivative Superposition Technique
Abolfazl Rajaiyan - Mehdi Saberi
Fully Soft-Switched Quadratic High Step-Up DC-DC Converter with a Single Switch and Low Input Current Ripple for Renewable Energy Applications
Ali Nadermohammadi - Hamed Abdi - Pouya Abolhassani - Seyed Hossein Hosseini - Mehran Sabahi - Naghi Rostami
A New Approch on Condition Assessment of MV Switchgear based on Thermal Evaluation
Mohsen Taghizadeh Kejani - Seyed Hamid Khalkhali - Ali asghar RaziKazemi
Low Cost Implementation of Neural Networks Based on Stochastic Computing
Hadi Jahanirad - Ahmad Menbari
An Improved Nonlinear Observer-Based Integrated Guidance and Control for Hypersonic Flight Vehicle with Angle Constraints
Seyedeh Mahsa Zakipour Bahambari - Saeed Khankalantary
Noninvasive Blood Pressure Classification Based on Photoplethysmography Using Machine Learning Techniques
Hanieh Mohammadi - Bahram Tarvirdizadeh - Khalil Alipour - Mohammad Ghamari
A Novel Image Denoising Algorithm Based on Wavelet and Akamatsu Transforms Using Particle Swarm Optimization
Zeinab Pakdaman - Majid Amini-Valashani - Sattar Mirzakuchaki
Multi-Objective Particle Swarm Optimization Of Spiral Antenna for Microwave Imaging Applications
Mehdi Yousefnia - Jaber Allahgholipor - Ataollah Ebrahimzadeh
Single-Frequency Microwave Measuring System for Liquid Characterization for Point-of-Care Testing
Saeed Javadizadeh - Mohammadjavad Bouloorchi Tabalvandani - Majid Badieirostami - Mahmoud Shahabadi
ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 40.4.2