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صفحه اصلی
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سی و سومین کنفرانس بین المللی مهندسی برق
Design and Simulation of a MEMS Capacitive Switch With Low Pull-in Voltage and High Switching Speed
نویسندگان :
Davoud Razaghpoor
1
Mir Majid Ghasemi
2
Saeid Afrang
3
Amir Fathi
4
Asma Akbarli
5
1- Urmia University
2- Urmia University
3- Urmia University
4- Urmia University
5- Urmia University
کلمات کلیدی :
MEMS،actuation،RF MEMS switch،pull-in،switching time
چکیده :
In this paper, a low-voltage RF MEMS capacitive switch with high switching speed is presented. The proposed design utilizes two switches with different dimensions, while the pull-in voltage of both structures remains the same. Additionally, the switching speed of the structure is enhanced by changing the material type. The actuation voltage of the two switches is approximately 3 volts, and their switching time is around 17 us. This structure offers four states, with the capacitive ratio of the structures being approximately 38 in dimensions of 464×250 um2. The isolation of the structure at a frequency of 40 GHz is about -44 dB, and the maximum stress generated in the switch is 41MPa. COMSOL Multiphysics software was used to simulate this structure.
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