کنفرانس مهندسی برق ایران

صفحه اصلی / سی و سومین کنفرانس بین المللی مهندسی برق

Design and Simulation of a MEMS Capacitive Switch With Low Pull-in Voltage and High Switching Speed

نویسندگان :

Davoud Razaghpoor¹ Mir Majid Ghasemi² Saeid Afrang³ Amir Fathi⁴ Asma Akbarli⁵

1- Urmia University 2- Urmia University 3- Urmia University 4- Urmia University 5- Urmia University

کلمات کلیدی :

MEMS،actuation،RF MEMS switch،pull-in،switching time

چکیده :

In this paper, a low-voltage RF MEMS capacitive switch with high switching speed is presented. The proposed design utilizes two switches with different dimensions, while the pull-in voltage of both structures remains the same. Additionally, the switching speed of the structure is enhanced by changing the material type. The actuation voltage of the two switches is approximately 3 volts, and their switching time is around 17 us. This structure offers four states, with the capacitive ratio of the structures being approximately 38 in dimensions of 464×250 um2. The isolation of the structure at a frequency of 40 GHz is about -44 dB, and the maximum stress generated in the switch is 41MPa. COMSOL Multiphysics software was used to simulate this structure.

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