کنفرانس مهندسی برق ایران

صفحه اصلی / سی و یکمین کنفرانس بین المللی مهندسی برق

The Conduction Mechanism in Micron-Thick ZnO Layers Grown on Si Substrates by Spray Pyrolysis

نویسندگان :

Mohsen Gharesi¹ Alireza Karimpour² Reza Razmand³ Faramarz Hossein-Babaei⁴

1- دانشگاه صنعتی خواجه نصیرالدین طوسی 2- دانشگاه صنعتی خواجه نصیرالدین طوسی 3- دانشگاه صنعتی خواجه نصیرالدین طوسی 4- دانشگاه صنعتی خواجه نصیرالدین طوسی

کلمات کلیدی :

Diffusion bonding،Ohmic contacts،Space-charge-limited conduction،Ultrasonic spray pyrolysis،Zinc oxide

چکیده :

Metal oxide films play vital roles in the electronics industry. Most current electronic devices are based on crystalline Si substrates, and metal oxide deposition on Si wafers can result in Si-compatible useful electronic features. The oxide deposition technique determines the functionality and production cost of such structures. Here, we report growing uniform micron-thick nanostructured ZnO films on oxidized p-Si substrates via the ultrasonic spray pyrolysis technique. This method is vacuum-less and can be scaled up for large-area depositions. Ohmic electrical contacts to the samples are made by the diffusion bonding of Ag wire segments to the ZnO layers. The prepared devices withstand elevated temperatures and harsh environments. The electrical characteristics of the samples are investigated by recording their current-voltage characteristics at different temperatures and voltage sweeping frequencies. The device conduction mechanism is described by the separate assessment of its ohmic and space-charge-limited currents.