0% Complete
صفحه اصلی
/
سی و یکمین کنفرانس بین المللی مهندسی برق
Design and simulation of a surface acoustic wave based micro pressure sensor
نویسندگان :
Sohrab Ghasemi Bisheh
1
Mohammad Tahmasebipour
2
Fatemeh Anousheh
3
1- دانشگاه تهران
2- دانشگاه تهران
3- دانشگاه تهران
کلمات کلیدی :
Micro pressure sensor،Simulation،Surface Acoustic Wave sensors،Microelectromechanical systems
چکیده :
Among electromechanical systems, sensors based on surface acoustic waves (SAW) are of particular importance due to their fast response, high sensitivity, compact structure, small size, low cost of mass production as well as their wide range of applications. This paper presents design simulation and optimization of a SAW based micro pressure sensor using finite element method. Using the mathematical model of Delta function and various analysis like time-dependent analysis and frequency-domain analysis, several methods for calculating the central frequency of this kind of sensors have been presented. Determination of central frequency is then followed by calculation of changes in surface acoustic wave velocities for applied pressures. This lead to obtain the sensitivity of microsensor. By optimization of the affecting parameters, sensitivity of this sensor has been improved up to -101 ppm/ bar.
لیست مقالات
لیست مقالات بایگانی شده
Small Target Detection Using an Enhanced Optimization Based Filter and Trajectory Tracking Via Pattern Matching Algorithm
Seyedeh Mahsa Zakipour Bahambari - Saeed Khankalantary
Tumor-treating fields orientation effects on breast cancer cells in vitro
Fatemeh Khanmohammadi - Mohammad Sadegh Bank - Majid Badieirostami
A Hybrid Approach for Multimodal Biometric Recognition based on Feature Level Fusion in Reproducing Kernel Hilbert Space
Mohammad Hassan Safavipour - Mohammad Ali Doostari - Hamed Sadjedi
ساخت حسگر گاز بر پایه ی گرافن اکساید و سیلیکون متخلخل
سیده صفیه رضایی - مینا امیر مزلقانی
Enhanced Optimal Droop Control for Effective Load Sharing in an Islanded Microgrid
Rafi Zahedi - Hassan Rastegar
Wideband Rat-race Hybrid Coupler Using Ridge Gap Waveguide Technology
Zahra Akhoondmahdi - Ahmad Bakhtafrouz
A new approach to design fuzzy interval observer for parameter-varying systems
Mostafa Faramin - Behrooz Rezaie - Zahra Rahmani
Performance analysis under the Independent Fluctuating Two-Ray (IFTR) Fading in RIS-Assisted Millimeter Wave Communications
Maryam Olyaee - Hadi Hashemi - Juan Manuel Romero Jerez
ادغام حسگرهای رادار، لیدار و دوربین به منظور بهبود عملکرد در تشخیص اهداف برای کاربرد خودروهای خودران
سید مسعود معصومی زاده - محمد سجادی - طاها محقق - منصور نادرپور - صادق شاه سنایی - محمد علی مددی - زهرا کاوه وش - علی فتوت احمدی
Robust Model Predictive Control of Cyber-Physical Linear Parameter Varying System subject to deception attacks and bounded disturbances
Sepideh Jahani VakilKandi - Farhad Bayat - Abolfazl Jalilvand
ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 40.4.2