کنفرانس مهندسی برق ایران

صفحه اصلی / سی و یکمین کنفرانس بین المللی مهندسی برق

Design and simulation of a surface acoustic wave based micro pressure sensor

نویسندگان :

Sohrab Ghasemi Bisheh¹ Mohammad Tahmasebipour² Fatemeh Anousheh³

1- دانشگاه تهران 2- دانشگاه تهران 3- دانشگاه تهران

کلمات کلیدی :

Micro pressure sensor،Simulation،Surface Acoustic Wave sensors،Microelectromechanical systems

چکیده :

Among electromechanical systems, sensors based on surface acoustic waves (SAW) are of particular importance due to their fast response, high sensitivity, compact structure, small size, low cost of mass production as well as their wide range of applications. This paper presents design simulation and optimization of a SAW based micro pressure sensor using finite element method. Using the mathematical model of Delta function and various analysis like time-dependent analysis and frequency-domain analysis, several methods for calculating the central frequency of this kind of sensors have been presented. Determination of central frequency is then followed by calculation of changes in surface acoustic wave velocities for applied pressures. This lead to obtain the sensitivity of microsensor. By optimization of the affecting parameters, sensitivity of this sensor has been improved up to -101 ppm/ bar.

لیست مقالات

لیست مقالات بایگانی شده

بهبود تخصیص منابع لبه‌ها در شبکه LTE مبتنی بر محاسبات لبه با رویکرد تعادل میان تاخیر و قابلیت اطمینان

ایمان عظیمی احمدآبادی - علی اکبر تدین تفت

Si/SiO2/Ag optical sensor

Alireza Karimpour - Mehrdad Naemi Dehkharghani - Faramarz Hossein-babaei

Low-cost dielectrophoresis-based microfluidic chip for label-free particle separation with 3D electrodes

Fatemeh Esmaeili - Zeynab Alipour - Mehdi Fardmanesh

Explorable Grasp Pose Detection for Two-Finger Robot Handover

AliReza Beigy - Mehdi Tale Masouleh - Ahmad Kalhor

Improved Stability and Controller Design Criteria for 2- or n-dimensional Differential-Algebraic-Equation Systems via LMI Approach

Abdolah RoshanaeeDeh - Masoud Shafiee - Hajar Atrianfar

A Comprehensive Analysis of a Digital Control Strategy for Photovoltaic-Based Single-Phase Grid-Tied Inverter Systems

Soheil Hasani Sangani - Mohamad Reza Moslemnejad - Mojtaba Saeedi - Alireza Jalalitalab - Reza Beiranvand

A Consensus-Based Approach for Short-Circuit Fault Type Detection in DC Microgrids Using ANFIS

Mohammadreza Mohammadhasani - Javad Sadeh

طراحی کنترل کننده مقاوم برای مدل غیرخطی بیماری کووید-19

آرمان مرزبان - الهام امینی بروجنی

Global Voltage Harmonic Index for Measuring Harmonic Situation of Power Grids: A Focus on Power Transformers

Alireza Zabihi - Mehrzad Bidari - Hossein Mokhtari

LoRa-based Intelligent Helmet for Coal Miner Safety: Neural Network Prediction and BLE Location Tracking

Saba Pirahmadian - Sorin Yousefnia - Soheil Ganjefar

ثمین همایش، سامانه مدیریت کنفرانس ها و جشنواره ها - نگارش 40.4.2